Neon and Manganese Ion Implantation into AlInN
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منابع مشابه
Anomalous ion channeling in AlInN/GaN bilayers: determination of the strain state.
Monte Carlo simulations of anomalous ion channeling in near-lattice-matched AlInN/GaN bilayers allow an accurate determination of the strain state of AlInN by Rutherford backscattering or channeling. Although these strain estimates agree well with x-ray diffraction (XRD) results, XRD composition estimates are shown to have limited accuracy, due to a possible deviation from Vegard's law, which w...
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تاریخ انتشار 2017